Atomistic simulations of acceptor removal in p-type Si irradiated with neutrons

  1. López, P.
  2. Aboy, M.
  3. Muñoz, I.
  4. Santos, I.
  5. Marqués, L.A.
  6. Fernández-Martínez, P.
  7. Ullán, M.
  8. Pelaz, L.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2022

Volume: 512

Pages: 42-48

Type: Article

DOI: 10.1016/J.NIMB.2021.12.003 GOOGLE SCHOLAR lock_openOpen access editor

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