Molecular Dynamics Study of Stress Relaxation During Ge Deposition on Si(100) 2× 1 Substrates

  1. Martin-Encinar, L.
  2. Marques, L.A.
  3. Aboy, M.
  4. Lopez, P.
  5. Santos, I.
  6. Pelaz, L.
Proceedings:
14th Spanish Conference on Electron Devices, CDE 2023 - Proceedings

ISBN: 9798350302400

Year of publication: 2023

14th Spanish Conference on Electron Devices, CDE 2023 - Proceedings

Type: Conference paper

DOI: 10.1109/CDE58627.2023.10339527 GOOGLE SCHOLAR

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