Bonding configuration and density of defects of SiOxH y thin films deposited by the electron cyclotron resonance plasma method

1. San Andrés, E.
2. Del Prado, A.
3. Mártil, I.
4. González-Díaz, G.
5. Bravo, D.
6. López, F.J.
7. Fernández, M.
8. Bohne, W.
9. Röhrich, J.
10. Selle, B.
11. Sieber, I.