Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures

  1. Garcia, S.
  2. Martil, I.
  3. Gonzalez Diaz, G.
  4. Castan, E.
  5. Dueñas, S.
  6. Fernandez, M.
Aldizkaria:
Journal of Applied Physics

ISSN: 0021-8979

Argitalpen urtea: 1998

Alea: 83

Zenbakia: 1

Orrialdeak: 332-338

Mota: Artikulua

DOI: 10.1063/1.366713 GOOGLE SCHOLAR
Datuen iturria: Scopus