Modeling of the effects of dose, dose rate, and implant temperature on transient enhanced diffusion

  1. Pelaz, L.
  2. Gilmer, G.H.
  3. Venezia, V.C.
  4. Gossmann, H.-J.
  5. Jaraiz, M.
  6. Barbolla, J.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 1999

Volume: 74

Issue: 14

Pages: 2017-2019

Type: Article

DOI: 10.1063/1.123742 GOOGLE SCHOLAR
Data source: Scopus