Carbon in silicon: Modeling of diffusion and clustering mechanisms
- Pinacho, R.
- Castrillo, P.
- Jaraiz, M.
- Martin-Bragado, I.
- Barbolla, J.
- Gossmann, H.-J.
- Gilmer, G.-H.
- Benton, J.-L.
ISSN: 0021-8979
Year of publication: 2002
Volume: 92
Issue: 3
Pages: 1582-1587
Type: Article