Physically based modelling of damage, amorphization, and recrystallization for predictive device-size process simulation

  1. Rubio, J.E.
  2. Jaraiz, M.
  3. Martin-Bragado, I.
  4. Pinacho, R.
  5. Castrillo, P.
  6. Barbolla, J.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2004

Volume: 114-115

Issue: SPEC. ISS.

Pages: 151-155

Type: Conference paper

DOI: 10.1016/J.MSEB.2004.07.039 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus