Comprehensive, physically based modelling of As in Si

  1. Pinacho, R.
  2. Jaraiz, M.
  3. Castrillo, P.
  4. Rubio, J.E.
  5. Martin-Bragado, I.
  6. Barbolla, J.
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2004

Volume: 114-115

Issue: SPEC. ISS.

Pages: 135-140

Type: Conference paper

DOI: 10.1016/J.MSEB.2004.07.026 GOOGLE SCHOLAR