Ion implant simulations: Kinetic Monte Carlo annealing assessment of the dominant features

  1. Martin-Bragado, I.
  2. Jaraiz, M.
  3. Castrillo, P.
  4. Pinacho, R.
  5. Rubio, J.E.
  6. Barbolla, J.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2004

Volume: 84

Issue: 24

Pages: 4962-4964

Type: Article

DOI: 10.1063/1.1762696 GOOGLE SCHOLAR
Data source: Scopus