Physically based modeling of dislocation loops in ion implantation processing in silicon
- Castrillo, P.
- Martin-Bragado, I.
- Pinacho, R.
- Jaraiz, M.
- Rubio, J.E.
- Mok, K.R.C.
- Miguel-Herrero, F.J.
- Barbolla, J.
ISSN: 0921-5107
Year of publication: 2005
Volume: 124-125
Issue: SUPPL.
Pages: 404-408
Type: Conference paper