Ion-implant simulations: The effect of defect spatial correlation on damage accumulation

  1. Mok, K.R.C.
  2. Jaraiz, M.
  3. Martin-Bragado, I.
  4. Rubio, J.E.
  5. Castrillo, P.
  6. Pinacho, R.
  7. Srinivasan, M.P.
  8. Benistant, F.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2005

Volume: 124-125

Issue: SUPPL.

Pages: 386-388

Type: Conference paper

DOI: 10.1016/J.MSEB.2005.08.100 GOOGLE SCHOLAR