A comparative study of atomic layer deposited advanced high-k dielectrics

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Barbolla, J.
  5. Kukli, K.
  6. Aarik, J.
  7. Ritala, M.
  8. Leskelä, M.
Proceedings:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Year of publication: 2005

Volume: 2005

Pages: 29-32

Type: Conference paper

DOI: 10.1109/SCED.2005.1504298 GOOGLE SCHOLAR