A comparative study of atomic layer deposited advanced high-k dielectrics
- Dueñas, S.
- Castán, H.
- García, H.
- Barbolla, J.
- Kukli, K.
- Aarik, J.
- Ritala, M.
- Leskelä, M.
Proceedings:
2005 Spanish Conference on Electron Devices, Proceedings
ISBN: 9780780388109
Year of publication: 2005
Volume: 2005
Pages: 29-32
Type: Conference paper