Ion-beam amorphization of semiconductors: A physical model based on the amorphous pocket population

1. Mok, K.R.C.
2. Jaraiz, M.
3. Martin-Bragado, I.
4. Rubio, J.E.
5. Castrillo, P.
6. Pinacho, R.
7. Barbolla, J.
8. Srinivasan, M.P.