Physical insight into boron activation and redistribution during annealing after low-temperature solid phase epitaxial regrowth
- Aboy, M.
- Pelaz, L.
- López, P.
- Marqús, L.A.
- Duffy, R.
- Venezia, V.C.
Zeitschrift:
Applied Physics Letters
ISSN: 0003-6951
Datum der Publikation: 2006
Ausgabe: 88
Nummer: 19
Art: Artikel