Predictive simulations and optimization of advanced ultra-shallow junction formation for nano-CMOS devices

  1. Colombeau, B.
  2. Mok, K.R.C.
  3. Yeong, S.H.
  4. Bénistant, F.
  5. Jaraiz, M.
  6. Chu, S.
Proceedings:
Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007

ISBN: 9781424411030

Year of publication: 2007

Pages: 17-22

Type: Conference paper

DOI: 10.1109/IWJT.2007.4279936 GOOGLE SCHOLAR
Data source: Scopus