Molecular dynamics study of amorphous pocket formation in Si at low energies and its application to improve binary collision models

  1. Santos, I.
  2. Marqués, L.A.
  3. Pelaz, L.
  4. López, P.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2007

Volume: 255

Issue: 1 SPEC. ISS.

Pages: 110-113

Type: Article

DOI: 10.1016/J.NIMB.2006.11.034 GOOGLE SCHOLAR

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