Identification of spatial localization and energetic position of electrically active defects in amorphous high-k dielectrics for advanced devices

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Bailón, L.
  5. Kukli, K.
  6. Aarik, J.
  7. Ritala, M.
  8. Leskelä, M.
Journal:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Year of publication: 2008

Volume: 354

Issue: 2-9

Pages: 393-398

Type: Article

DOI: 10.1016/J.JNONCRYSOL.2007.07.049 GOOGLE SCHOLAR