Atomistic process modeling based on kinetic Monte Carlo and molecular dynamics for optimization of advanced devices

  1. Pelaz, L.
  2. Marques, L.
  3. Aboy, M.
  4. Lopez, P.
  5. Santos, I.
  6. Duffy, R.
Konferenzberichte:
Technical Digest - International Electron Devices Meeting, IEDM

ISSN: 0163-1918

ISBN: 9781424456406

Datum der Publikation: 2009

Art: Konferenz-Beitrag

DOI: 10.1109/IEDM.2009.5424309 GOOGLE SCHOLAR
Datenquelle: Scopus