Atomistic simulations of the effect of implant parameters on Si damage

  1. López, P.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Aboy, M.
  5. Santos, I.
Proceedings:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Year of publication: 2009

Pages: 12-15

Type: Conference paper

DOI: 10.1109/SCED.2009.4800417 GOOGLE SCHOLAR
Data source: Scopus