Kinetics of large B clusters in crystalline and preamorphized silicon

1. Aboy, M.
2. Pelaz, L.
3. Bruno, E.
4. Mirabella, S.
5. Boninelli, S.

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DOI: 10.1063/1.3639280 GOOGLE SCHOLAR lock_openUVADOC editor

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MODELADO Y SIMULACIÓN MULTI-ESCALA DE PROCESOS DE FABRICACIÓN DE DISPOSITIVOS ELECTRÓNICOS NANOMÉTRICOS DE SILICIO

2009/00050/001

Data source: Scopus