Modeling of advanced ion implantation technologies in semiconductors

  1. Pelaz, L.
  2. Marqués, L.A.
  3. Santos, I.
  4. López, P.
  5. Aboy, M.
Proceedings:
Extended Abstracts of the 11th International Workshop on Junction Technology, IWJT 2011

ISBN: 9781612841328

Year of publication: 2011

Pages: 34-39

Type: Conference paper

DOI: 10.1109/IWJT.2011.5969995 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus