Composition profiles in InP/InAsP quantum well structures under the effect of reactives gases during dry etching processes - Luminescence and SIMS

  1. Landesman, J.-P.
  2. Jimenéz, J.
  3. Hortelano, V.
  4. Léger, Y.
  5. Folliot, H.
  6. Delhaye, T.
  7. Torres, A.
  8. Rhallabi, A.
Konferenzberichte:
Conference Proceedings - International Conference on Indium Phosphide and Related Materials

ISSN: 1092-8669

ISBN: 9781479957293

Datum der Publikation: 2014

Art: Konferenz-Beitrag

DOI: 10.1109/ICIPRM.2014.6880554 GOOGLE SCHOLAR

Ziele für nachhaltige Entwicklung

Datenquelle: Scopus