A complete suite of experimental techniques for electrical characterization of conventional and incoming high-k dielectric-based devices

  1. Duenas, S.
  2. Castán, H.
  3. García, H.
  4. Arroval, T.
  5. Tamm, A.
  6. Kukli, K.
  7. Aarik, J.
Actes de conférence:
ECS Transactions

ISSN: 1938-5862 1938-6737

ISBN: 9781607687122

Année de publication: 2016

Volumen: 72

Número: 2

Pages: 153-165

Type: Communication dans un congrès

DOI: 10.1149/07202.0153ECST GOOGLE SCHOLAR