Hole trap distribution on 2 MeV electron irradiated high-k dielectrics

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Fuentes, L.M.
  5. Bailón, L.
  6. Campabadal, F.
  7. Rafí, J.M.
  8. González, M.B.
  9. Takakura, K.
  10. Tsunoda, I.
  11. Yoneoka, M.
Journal:
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN: 2166-2754,  2166-2746

Year of publication: 2015

Volume: 33

Issue: 3

Type: Article

DOI: 10.1116/1.4915617 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus