Fundamental diffusion issues for deep-submicron device processing
- Cowern, N.E.B.
- Jaraiz, M.
- Cristiano, F.
- Claverie, A.
- Mannino, G.
Proceedings:
Technical Digest - International Electron Devices Meeting
ISSN: 0163-1918
Year of publication: 1999
Pages: 333-336
Type: Conference paper