Atomistic model of transient enhanced diffusion and clustering of boron in silicon
- Pelaz, L.
- Gilmer, G.H.
- Jaraiz, M.
- Gossmann, H.-J.
- Rafferty, C.S.
- Eaglesham, D.J.
- Poate, J.M.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1997
Volume: 469
Pages: 341-346
Type: Conference paper