Simulation of cluster evaporation and transient enhanced diffusion in silicon
- Rafferty, C.S.
- Gilmer, G.H.
- Jaraiz, M.
- Eaglesham, D.
- Gossmann, H.-J.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 1995
Pages: 2395
Type: Article