Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures
- Martín, E.
- Sanz, L.F.
- Jiménez, J.
- Pérez-Rodríguez, A.
- Morante, J.R.
- Aspar, B.
- Margail, J.
ISSN: 0040-6090
Année de publication: 1997
Volumen: 311
Número: 1-2
Pages: 225-229
Type: Article