Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit

  1. Tsai, C.-H.
  2. Savant, C.P.
  3. Asadi, M.J.
  4. Lin, Y.-M.
  5. Santos, I.
  6. Hsu, Y.-H.
  7. Kowalski, J.
  8. Pelaz, L.
  9. Woon, W.-Y.
  10. Lee, C.-K.
  11. Hwang, J.C.M.
Zeitschrift:
Applied Physics Letters

ISSN: 0003-6951

Datum der Publikation: 2022

Ausgabe: 121

Nummer: 5

Art: Artikel

DOI: 10.1063/5.0099083 GOOGLE SCHOLAR lock_openOpen Access editor
Datenquelle: Scopus