Surface morphology of silicon carbide layers deposited by cyclotron resonance plasma

  1. Gomez, FJ
  2. RodriguezMendez, ML
  3. Piqueras, J
  4. Jimenez, J
  5. DeSaja, JA
Book Series:
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS 1995
  1. Mickleson, AR (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0372-7

Year of publication: 1996

Volume: 149

Pages: 67-72

Congress: Defect Recognition and Image Processing in Semiconductors 1995 Conference (DRIP VI)

Type: Conference paper

GOOGLE SCHOLAR
Data source: WoS