Defects and diffusion in MeV implanted silicon

  1. Venezia, VC
  2. Haynes, TE
  3. Agarwal, A
  4. Gossmann, HJ
  5. Pelaz, L
  6. Jacobson, DC
  7. Eaglesham, DJ
  8. Duggan, JL
Book Series:
APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2
  1. Duggan, JL (coord.)
  2. Morgan, IL (coord.)

ISSN: 0094-243X

ISBN: 1-56396-825-8

Year of publication: 1999

Volume: 475

Pages: 784-788

Congress: 15th International Conference on the Application of Accelerators in Research and Industry

Type: Conference paper

GOOGLE SCHOLAR
Data source: WoS