Characterization of the new type of structural defects in Si by the scanning optical and electron beam techniques

  1. Eremenko, V
  2. Jimenez, J
  3. Fedorov, A
  4. Garcia, C
  5. Sanz, LF
  6. Avella, M
Büchersammlung:
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS 1997
  1. Donecker, J (coord.)
  2. Rechenberg, I (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0500-2

Datum der Publikation: 1998

Ausgabe: 160

Seiten: 269-272

Kongress: 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP-VII)

Art: Konferenz-Beitrag

GOOGLE SCHOLAR
Fuente de los datos: WoS