A STUDY OF CHANNELING AND INDUCED DAMAGE IN BORON-IMPLANTED SILICON

  1. DUENAS, S
  2. CASTAN, E
  3. BARBOLLA, J
  4. MONTSERRAT, J
  5. TAMAYO, EL
Book Series:
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS AND DEVICES
  1. Jimenez, J (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0294-1

Year of publication: 1994

Pages: 47-50

Congress: 5th International Conference on Defect Recognition and Image Processing in Semiconductors and Devices

Type: Conference paper

GOOGLE SCHOLAR
Data source: WoS