ALFONSO
GOMEZ BRAVO
PROFESOR CONTRATADO DOCTOR
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Universidad de Buenos Aires
Buenos Aires, ArgentinaPublikationen in Zusammenarbeit mit Forschern von Universidad de Buenos Aires (1)
2011
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Electrical characteristics of metal-insulator-semiconductor structures with atomic layer deposited Al2 O3, HfO2, and nanolaminates on different silicon substrates
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics