SALVADOR
DUEÑAS CARAZO
CATEDRATICOS DE UNIVERSIDAD
![Foto de M.A.](/img/nophoto.png)
M.A.
Fernández Fernández
Publicaciones en las que colabora con M.A. Fernández Fernández (2)
1998
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Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures
Journal of Applied Physics, Vol. 83, Núm. 1, pp. 332-338
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Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method
Journal of Applied Physics, Vol. 83, Núm. 1, pp. 600-603