Publicaciones en las que colabora con Emilio Lora-Tamayo D'Ocón (1)

1993

  1. Electrical characterization of MOS structures fabricated on SF6 and SF6 + C2CIF5 reactive ion etched silicon

    Nuclear Inst. and Methods in Physics Research, B, Vol. 80-81, Núm. PART 2, pp. 1362-1366