JOSE
VICENTE ANTON
Forscher in der Zeit 1984-2023
MARÍA HELENA
CASTAN LANASPA
CATEDRATICOS DE UNIVERSIDAD
Publikationen, an denen er mitarbeitet MARÍA HELENA CASTAN LANASPA (1)
1993
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Electrical characterization of MOS structures fabricated on SF6 and SF6 + C2CIF5 reactive ion etched silicon
Nuclear Inst. and Methods in Physics Research, B, Vol. 80-81, Núm. PART 2, pp. 1362-1366