Publications (14) Publications in which a researcher has participated

2006

  1. Atomistic modeling of dopant implantation, diffusion, and activation

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, Núm. 5, pp. 2432-2436

  2. Physical insight into ultra-shallow junction formation through atomistic modeling

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 253, Núm. 1-2, pp. 41-45

2005

  1. Boron diffusion in amorphous silicon

    Materials Science and Engineering B: Solid-State Materials for Advanced Technology

  2. Damage buildup model with dose rate and temperature dependence

    2005 Spanish Conference on Electron Devices, Proceedings

  3. Simulation analysis of boron pocket deactivation in NMOS transistors with SPER junctions

    2005 Spanish Conference on Electron Devices, Proceedings