Science of Materials and Metallurgic Engineering, Graphic Expression in Engineering, Mapping Engineering, Geodesy and Ph
Department
Universidad de Buenos Aires
Buenos Aires, ArgentinaPublications in collaboration with researchers from Universidad de Buenos Aires (1)
2011
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Electrical characteristics of metal-insulator-semiconductor structures with atomic layer deposited Al2 O3, HfO2, and nanolaminates on different silicon substrates
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics