Titanium doped silicon layers with very high concentration

  1. Olea, J.
  2. Toledano-Luque, M.
  3. Pastor, D.
  4. González-Díaz, G.
  5. Mártil, I.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 2008

Volumen: 104

Número: 1

Type: Article

DOI: 10.1063/1.2949258 GOOGLE SCHOLAR