Study of Si+-implanted and annealed InP by means of Raman spectroscopy

  1. Cuscó, R.
  2. Ibáñez, J.
  3. Blanco, N.
  4. González-Díaz, G.
  5. Artús, L.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 1997

Volume: 132

Issue: 4

Pages: 627-632

Type: Article

DOI: 10.1016/S0168-583X(97)00512-0 GOOGLE SCHOLAR
Data source: Scopus