Study of Si+-implanted and annealed InP by means of Raman spectroscopy

  1. Cuscó, R.
  2. Ibáñez, J.
  3. Blanco, N.
  4. González-Díaz, G.
  5. Artús, L.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 1997

Alea: 132

Zenbakia: 4

Orrialdeak: 627-632

Mota: Artikulua

DOI: 10.1016/S0168-583X(97)00512-0 GOOGLE SCHOLAR
Datuen iturria: Scopus