Atomistic study of the anisotropic interaction between extended and point defects in crystalline silicon and its influence on Si self-interstitial diffusion
- Santos, I.
- Aboy, M.
- Marques, L.A.
- Lopez, P.
- Ruiz, M.
- Pelaz, L.
- Hernandez-Diaz, A.M.
- Castrillo, P.
Proceedings:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
ISBN: 9781509008179
Year of publication: 2016
Pages: 35-37
Type: Conference paper