Ion-beam processing of silicon at keV energies: A molecular-dynamics study
- Caturla, M.
- Díaz de la Rubia, T.
- Marqués, L.
- Gilmer, G.
ISSN: 1550-235X, 1098-0121
Année de publication: 1996
Volumen: 54
Número: 23
Pages: 16683-16695
Type: Article
Revue:
Physical Review B - Condensed Matter and Materials Physics