Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectrics

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Barquero, R.
  7. Kukli, K.
  8. Ritala, M.
  9. Leskelä, M.
Journal:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 1071-1023

Year of publication: 2009

Volume: 27

Issue: 1

Pages: 416-420

Type: Article

DOI: 10.1116/1.3021040 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus