Raman scattering and photoluminescence analysis of silicon on insulator structures obtained by single and multiple oxygen implants

  1. Pérez-Rodríguez, A.
  2. Cornet, A.
  3. Morante, J.R.
  4. Jiménez, J.
  5. Hemment, P.L.F.
  6. Homewood, K.P.
Revista:
Journal of Applied Physics

ISSN: 0021-8979

Ano de publicación: 1991

Volume: 70

Número: 3

Páxinas: 1678-1683

Tipo: Artigo

DOI: 10.1063/1.349536 GOOGLE SCHOLAR
Fonte de datos: Scopus