Raman characterization of SOI-SIMOX structures

  1. Martin, E.
  2. Jiménez, J.
  3. Pérez-Rodrígues, A.
  4. Morante, J.R.
Journal:
Materials Letters

ISSN: 0167-577X

Year of publication: 1992

Volume: 15

Issue: 1-2

Pages: 122-126

Type: Article

DOI: 10.1016/0167-577X(92)90026-G GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus