Detailed computer simulation of ion implantation processes into crystals

  1. Arias, J.
  2. Jaraiz, M.
  3. Rubio, J.E.
  4. Pelaz, L.
  5. Marqués, L.A.
  6. Barbolla, J.
Journal:
Materials Science and Technology (United Kingdom)

ISSN: 1743-2847,  0267-0836

Year of publication: 1995

Volume: 11

Issue: 11

Pages: 1191-1193

Type: Article

DOI: 10.1179/MST.1995.11.11.1191 GOOGLE SCHOLAR
Data source: Scopus