B diffusion and clustering in ion implanted Si: The role of B cluster precursors

  1. Pelaz, L.
  2. Jaraiz, M.
  3. Gilmer, G.H.
  4. Gossmann, H.-J.
  5. Rafferty, C.S.
  6. Eaglesham, D.J.
  7. Poate, J.M.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 1997

Volume: 70

Issue: 17

Pages: 2285-2287

Type: Article

DOI: 10.1063/1.118839 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus