Ion mass influence on transient enhanced diffusion and boron clustering in silicon: Deviation from the "+1" model

1. Herner, S.B.
2. Gossmann, H.-J.
3. Pelaz, L.P.
4. Gilmer, G.H.
5. Jaraíz, M.
6. Jacobson, D.C.
7. Eaglesham, D.J.